JOURNAL ARTICLE
The Simulation Study of Miro-Inductor Based Planar Spiral MEMS Coil Arrays
Keywords:
Microelectromechanical systems Planar Inductor Electromagnetic coil Spiral (railway) Materials science Physics Optoelectronics Electrical engineering Computer science Engineering Mechanical engineering Computer graphics (images) Voltage
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Topics
Modular Robots and Swarm Intelligence
Physical Sciences → Engineering → Mechanical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Antenna Design and Optimization
Physical Sciences → Engineering → Aerospace Engineering
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