JOURNAL ARTICLE

The Simulation Study of Miro-Inductor Based Planar Spiral MEMS Coil Arrays

Keywords:
Microelectromechanical systems Planar Inductor Electromagnetic coil Spiral (railway) Materials science Physics Optoelectronics Electrical engineering Computer science Engineering Mechanical engineering Computer graphics (images) Voltage

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
5
Refs
0.28
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Modular Robots and Swarm Intelligence
Physical Sciences →  Engineering →  Mechanical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Antenna Design and Optimization
Physical Sciences →  Engineering →  Aerospace Engineering

Related Documents

JOURNAL ARTICLE

New Planar Inductor Arranged Unit Spiral Coil

Shinichiro IshibashiY. MotoiK. ShirakawaO. NakazimaK. Murakami

Journal:   [1993] Digests of International Magnetics Conference Year: 1993 Pages: DQ-DQ
JOURNAL ARTICLE

Design for Integrated Planar Spiral Inductor for MEMS

Yamina BenhaddaMokhtaria DerkaouiKheira MendazHayet KharbouchP. Spitéri

Journal:   Periodica Polytechnica Electrical Engineering and Computer Science Year: 2023 Vol: 67 (4)Pages: 425-437
JOURNAL ARTICLE

Design and Simulation of RF MEMS Tunable Spiral Inductor

Sholeh GholamianEbrahim Abbaspour-Sani

Journal:   Advanced materials research Year: 2011 Vol: 403-408 Pages: 4148-4151
© 2026 ScienceGate Book Chapters — All rights reserved.