Planar Spiral Micro-Inductor Based on Graphene/Cu Composite Film Conductive Coil Fabricated by MEMS Technology

Chong Lei; Quankun Ma; Shaotao Zhi; Lili Yan; Chong Zhang; Cui Liu; Xuecheng Sun

doi:10.1007/s11664-023-10720-3

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Planar Spiral Micro-Inductor Based on Graphene/Cu Composite Film Conductive Coil Fabricated by MEMS Technology

Chong Lei Quankun Ma Shaotao Zhi Lili Yan Chong Zhang Cui Liu Xuecheng Sun

Year: 2023 Journal: Journal of Electronic Materials Vol: 52 (12)Pages: 8030-8037 Publisher: Springer Science+Business Media

DOI: 10.1007/s11664-023-10720-3

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Keywords:

Graphene Materials science Microelectromechanical systems Inductor Optoelectronics Sheet resistance Inductance Composite number Nanotechnology Composite material Voltage Electrical engineering Layer (electronics)

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Graphene research and applications

Physical Sciences → Materials Science → Materials Chemistry

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Planar Spiral Micro-Inductor Based on Graphene/Cu Composite Film Conductive Coil Fabricated by MEMS Technology

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