Fabrication of high aspect ratio diamond tip using reactive ion etching

Farheen Nasir; Aixi Pan; Bo Cui

doi:10.1016/j.diamond.2025.111950

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Fabrication of high aspect ratio diamond tip using reactive ion etching

Farheen Nasir Aixi Pan Bo Cui

Year: 2025 Journal: Diamond and Related Materials Vol: 152 Pages: 111950-111950 Publisher: Elsevier BV

DOI: 10.1016/j.diamond.2025.111950

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Keywords:

Fabrication Reactive-ion etching Diamond Etching (microfabrication) Nanotechnology Materials science Aspect ratio (aeronautics) Ion Optoelectronics Chemistry Composite material

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Fabrication of high aspect ratio diamond tip using reactive ion etching

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