Flexible Piezoresistive Film Pressure Sensor Based on Double-Sided Microstructure Sensing Layer

Abstract

Flexible thin-film pressure sensors have garnered significant attention due to their applications in industrial inspection and human–computer interactions. However, due to their ultra-thin structure, these sensors often exhibit lower performance, including a narrow pressure response range and low sensitivity, which constrains their further application. The most commonly used microstructure fabrication methods are challenging to apply to ultra-thin functional layers and may compromise the structural stability of the sensors. In this study, we present a novel design of a film pressure sensor with a double-sided microstructure sensing layer by adopting the template method. By incorporating the double-sided microstructures, the proposed thin-film pressure sensor can simultaneously achieve a high sensitivity value of 5.5 kPa−1 and a wide range of 140 kPa, while maintaining a short response time of 120 ms and a low detection limit. This flexible film pressure sensor demonstrates considerable potential for distributed pressure sensing and industrial pressure monitoring applications.