Flexible Capacitive Pressure Sensor Based on a Double-Sided Microstructure Porous Dielectric Layer

Abstract

In the era of intelligent sensing, there is a huge demand for flexible pressure sensors. High sensitivity is the primary requirement for flexible pressure sensors, whereas pressure response range and resolution, which are also key parameters of sensors, are often ignored, resulting in limited applications of flexible pressure sensors. This paper reports a flexible capacitive pressure sensor based on a double-sided microstructure porous dielectric layer. First, a porous structure was developed in the polymer dielectric layer consisting of silicon rubber (SR)/NaCl/carbon black (CB) using the dissolution method, and then hemisphere microstructures were developed on both sides of the layer by adopting the template method. The synergistic effect of the hemispheric surface microstructure and porous internal structure improves the deformability of the dielectric layer, thus achieving high sensitivity (3.15 kPa−1), wide response range (0–200 kPa), and high resolution (i.e., the minimum pressure detected was 27 Pa). The proposed sensing unit and its array have been demonstrated to be effective in large-area pressure sensing and object recognition. The flexible capacitive pressure sensor developed in this paper is highly promising in applications of robot skin and intelligent prosthetic hands.