Absence of Electrical Contact Resistance Degradation in MEMS Relays Subject to Hot Switching

Deepak Kumar; Maarten P. Boer

doi:10.1109/holm56222.2024.10768591

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Absence of Electrical Contact Resistance Degradation in MEMS Relays Subject to Hot Switching

Deepak Kumar Maarten P. Boer

Year: 2024 Pages: 1-6

DOI: 10.1109/holm56222.2024.10768591

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Keywords:

Degradation (telecommunications) Contact resistance Microelectromechanical systems Electrical contacts Materials science Electrical engineering Computer science Electronic engineering Optoelectronics Engineering Composite material

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Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Absence of Electrical Contact Resistance Degradation in MEMS Relays Subject to Hot Switching

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