Void-free upper cladding deposition process for low-loss integrated silicon nitride photonics

JOURNAL ARTICLE

Year: 2024 Journal: Physical Review Applied Vol: 22 (5) Publisher: American Physical Society

DOI: 10.1103/physrevapplied.22.054027

Keywords:

Cladding (metalworking) Materials science Silicon nitride Nitride Photonics Void (composites) Optoelectronics Composite material Silicon

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