Modeling and Analysis of MEMS Electrostatic Energy Harvesting System

Abstract

Abstract Energy harvesting generators for low-power wireless electronic devices have drawn more attention in recent years. The design and analysis of a MEMS energy harvester based on electrostatic transduction are discussed in this study. Because a folded beam design has the advantage of being able to move huge dimensions, be compliant in the desired direction, and stiffer in the orthogonal direction. Large displacement of the energy harvester’s proof mass results in improved performance. The spice circuit of the harvester has been modelled and performed simulation to evaluate the output power of the harvester in LTSPICE. FEM simulations using COMSOL were used to assess the natural frequency and mode shape of the system and compare results with those of analytically determined values.