An Electrostatic MEMS Frequency Up-converter for Efficient Energy Harvesting

Abstract

The design of an MEMS frequency up-converter is described in this paper, The device consists of two electrostatically coupled resonators that relies on the hysteresis of electrostatic pull-in in order to multiply the input excitation frequency by a significant factor, possibly up to several orders of magnitudes in order to increase the efficient of electrostatic energy harvesting. An analytical solution of the performance of the device is obtained using a spring-mass model, and the optimal values of physical parameters are derived analytically.