OT5.81 - CMOS Compatible Electrostatically Formed Silicon Nanowire for Selective Ppb Level Sensing Platform

JOURNAL ARTICLE

Year: 2024 Journal: Lectures Pages: 105-106 Publisher: OpenEdition Journals

DOI: 10.5162/eurosensorsxxxvi/ot5.81

Keywords:

CMOS Silicon nanowires Silicon Materials science Nanowire Optoelectronics Electronic engineering Engineering

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