Nanopatterning of thin amorphous vanadium oxide films by oxidation scanning probe lithography

А. I. Komonov; Nikita D. Mantsurov; Bogdan V. Voloshin; V. A. Seleznev; Sergey V. Mutilin

doi:10.1016/j.apsusc.2024.159869

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Nanopatterning of thin amorphous vanadium oxide films by oxidation scanning probe lithography

А. I. Komonov Nikita D. Mantsurov Bogdan V. Voloshin V. A. Seleznev Sergey V. Mutilin

Year: 2024 Journal: Applied Surface Science Vol: 658 Pages: 159869-159869 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2024.159869

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Keywords:

Materials science Amorphous solid Vanadium Nanostructure Pentoxide Lithography Vanadium oxide Nanotechnology Dissolution Thin film Oxide Chemical engineering Optoelectronics Chemistry Crystallography Metallurgy

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Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Advanced Memory and Neural Computing

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanopatterning of thin amorphous vanadium oxide films by oxidation scanning probe lithography

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