Oxidation Scanning Probe Lithography

BOOK-CHAPTER

Year: 2022 Pages: 61-83

DOI: 10.1201/9781003223610-6

Keywords:

Lithography Materials science Nanotechnology Optoelectronics

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.38

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering