High Quality Factor Deuterated Silicon-Rich Nitride Micro-Ring Resonators

Xavier X. Chia; Peng Xing; Ju Won Choi; Dawn T. H. Tan

doi:10.1109/cleo-pr62338.2022.10432408

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High Quality Factor Deuterated Silicon-Rich Nitride Micro-Ring Resonators

Xavier X. Chia Peng Xing Ju Won Choi Dawn T. H. Tan

Year: 2022 Pages: 1-2

DOI: 10.1109/cleo-pr62338.2022.10432408

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Abstract

Micro-Ring Resonators were fabricated on Deuterated Silicon-Rich Nitride films and characterised. Fabricated devices yield intrinsic quality factors of up to 127,000 and propagation losses of less than 2 dB/cm.

Keywords:

Resonator Materials science Silicon Q factor Optoelectronics Silicon nitride Quality (philosophy) Nitride Ring (chemistry) Deuterium Optical ring resonators Nanotechnology Physics Chemistry Atomic physics Layer (electronics)

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Gyrotron and Vacuum Electronics Research

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

High Quality Factor Deuterated Silicon-Rich Nitride Micro-Ring Resonators

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