High Quality Factor Deuterated Silicon Nitride (SiN:D) Microring Resonators

Abstract

We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2 × 106 at 1547.6 nm, and >0.8 × 106 throughout 1500 – 1600 nm.