Flexible capacitive pressure sensors and their applications in human-machine interactions

Abstract

Flexible pressure sensors offer more significant advantages than rigid sensors in various applications, including human-computer interaction, medical health, and robot touch. However, this also places more stringent demands on the materials used. For example, the materials must be thin and soft enough to fit onto the surface of the human skin or be implanted into the body while also exhibiting good biocompatibility and matching the mechanical properties of biological tissues. Regarding device performance, flexible pressure sensor design primarily focuses on enhancing sensitivity, response time, detection limit, and stability. Researchers have recently been expanding these sensors' pressure response range, pressure resolution, spatial resolution, and tensile performance, which will further broaden their potential applications. This review provides an overview of the recent classification of flexible pressure sensors, covering their sensing principle, sensing performance, and future application prospects.