Flexible Capacitive Pressure Sensors and Their Applications in Human-Machine Interactions

Abstract

Flexible capacitive pressure sensors have shown excellent application potential in human-machine interactions, wearable electronic devices, biological and medical, and electronic skin. Compared with piezoresistive and piezoelectric pressure sensors, capacitive pressure sensors with advantages such as high flexibility, high stability, low consumption, and simple construction. Because of these advantages, flexible capacitive pressure sensors have become the key research direction of pressure sensors in recent years. This paper introduces the working principle of flexible capacitive pressure sensors and discusses numerous research on improving the performance of flexible capacitive pressure sensors. Then two methods of improving the dielectric layer structures to improve the sensitivity of the sensor and some related works are reviewed. Finally, the flexible capacitive pressure sensors' huge potential for advances in human-machine interactions areas such as health care and motion monitoring is also discussed. The paper concludes with an overview of future research directions of improving the performance of flexible capacitive pressure sensors.