Fabrication of high aspect ratio grooves on aluminium nitride by laser and chemical milling enhanced micro milling

Ni Chen; Jiawei Liu; Ning He; Xingzhi Xiao; Junyi Zhao; Yibo Jia; Nan Yu

doi:10.1016/j.jmatprotec.2024.118299

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Fabrication of high aspect ratio grooves on aluminium nitride by laser and chemical milling enhanced micro milling

Ni Chen Jiawei Liu Ning He Xingzhi Xiao Junyi Zhao Yibo Jia Nan Yu

Year: 2024 Journal: Journal of Materials Processing Technology Vol: 325 Pages: 118299-118299 Publisher: Elsevier BV

DOI: 10.1016/j.jmatprotec.2024.118299

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Keywords:

Materials science Aluminium Surface roughness Groove (engineering) Machining Laser Allowance (engineering) Surface finish Ceramic Nitride Milling cutter Composite material Fabrication Metallurgy Optics Mechanical engineering Layer (electronics)

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Advanced machining processes and optimization

Physical Sciences → Engineering → Mechanical Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Advanced Machining and Optimization Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Fabrication of high aspect ratio grooves on aluminium nitride by laser and chemical milling enhanced micro milling

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