JOURNAL ARTICLE

Fabrication of micro-pillar with high aspect ratio on monocrystalline diamond by galvanometer-assisted femtosecond laser milling

Tianye JinJunyun ChenShengkang ZhangTeng ZhaoQingliang Zhao

Year: 2020 Journal:   Journal of Manufacturing Processes Vol: 60 Pages: 247-256   Publisher: Elsevier BV
Keywords:
Materials science Femtosecond Machining Diamond Pillar Galvanometer Monocrystalline silicon Laser Diamond tool Fabrication Optoelectronics Optics Nanotechnology Composite material Silicon Metallurgy Diamond turning Mechanical engineering

Metrics

13
Cited By
0.52
FWCI (Field Weighted Citation Impact)
42
Refs
0.58
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
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