Fabrication of micro-pillar with high aspect ratio on monocrystalline diamond by galvanometer-assisted femtosecond laser milling

Tianye Jin; Junyun Chen; Shengkang Zhang; Teng Zhao; Qingliang Zhao

doi:10.1016/j.jmapro.2020.10.055

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Fabrication of micro-pillar with high aspect ratio on monocrystalline diamond by galvanometer-assisted femtosecond laser milling

Tianye Jin Junyun Chen Shengkang Zhang Teng Zhao Qingliang Zhao

Year: 2020 Journal: Journal of Manufacturing Processes Vol: 60 Pages: 247-256 Publisher: Elsevier BV

DOI: 10.1016/j.jmapro.2020.10.055

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Keywords:

Materials science Femtosecond Machining Diamond Pillar Galvanometer Monocrystalline silicon Laser Diamond tool Fabrication Optoelectronics Optics Nanotechnology Composite material Silicon Metallurgy Diamond turning Mechanical engineering

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Fabrication of micro-pillar with high aspect ratio on monocrystalline diamond by galvanometer-assisted femtosecond laser milling

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Citation History

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