Fabrication of high aspect ratio and low taper angle micro-holes utilizing complex water-assisted femtosecond laser drilling

JOURNAL ARTICLE

Year: 2025 Journal: Optics & Laser Technology Vol: 185 Pages: 112608-112608 Publisher: Elsevier BV

DOI: 10.1016/j.optlastec.2025.112608

Keywords:

Fabrication Femtosecond Laser drilling Materials science Drilling Laser Optics Optoelectronics Metallurgy Physics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering