NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009

BOOK

Year: 2009 Trans Tech Publications Ltd. eBooks

DOI: 10.4028/b-hl5kn8

Keywords:

Nanoelectromechanical systems Microelectromechanical systems Engineering Nanotechnology Materials science

Metrics

Cited By

0.10

FWCI (Field Weighted Citation Impact)

Refs

0.83

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering