BOOK-CHAPTER
Systems-Level: Development and Challenges of Solid Immersion Lens
Zhongling QianChristof Brillert
Year: 2023 ASM International eBooks Pages: 83-90 Publisher: ASM International
Abstract
Abstract This chapter assesses the benefits of using a solid immersion lens (SIL) to detect faults in ICs via optical imaging and laser-stimulation techniques. It discusses the advantages and limitations of different types of SILs and their effect on spatial resolution, spot size, focus depth, and collection efficiency. It also provides a brief overview of technical challenges at the die level.
Keywords:
Immersion (mathematics) Lens (geology) Optics Laser Computer science Materials science Physics Mathematics
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Cited By
1.32
FWCI (Field Weighted Citation Impact)
10
Refs
0.83
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Is in top 1%
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Citation History
Topics
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences → Engineering → Electrical and Electronic Engineering
Near-Field Optical Microscopy
Physical Sciences → Engineering → Biomedical Engineering
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
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