Investigation of Micro Solid Immersion Lens Mounting Systems

Matthew J. Lang; Tom D. Milster; Takahisa Minamitani; Gregg T. Borek

doi:10.1143/jjap.46.3737

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JOURNAL ARTICLE

Investigation of Micro Solid Immersion Lens Mounting Systems

Matthew J. Lang Tom D. Milster Takahisa Minamitani Gregg T. Borek

Year: 2007 Journal: Japanese Journal of Applied Physics Vol: 46 (6S)Pages: 3737-3737 Publisher: Institute of Physics

DOI: 10.1143/jjap.46.3737

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Abstract

Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.

Keywords:

Immersion (mathematics) Oil immersion Wafer Lens (geology) Refractive index Materials science Optics Computer science Optoelectronics Composite material Physics Mathematics

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Near-Field Optical Microscopy

Physical Sciences → Engineering → Biomedical Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

Investigation of Micro Solid Immersion Lens Mounting Systems

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