Removal of silicon-containing contaminants from TEM specimens

Dongsheng He

doi:10.1016/j.ultramic.2023.113797

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Removal of silicon-containing contaminants from TEM specimens

Dongsheng He

Year: 2023 Journal: Ultramicroscopy Vol: 253 Pages: 113797-113797 Publisher: Elsevier BV

DOI: 10.1016/j.ultramic.2023.113797

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Keywords:

Silicon Contamination Electron microscope Materials science Transmission electron microscopy Environmental chemistry Nanotechnology Analytical Chemistry (journal) Chemistry Metallurgy Optics Physics

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Advanced Electron Microscopy Techniques and Applications

Life Sciences → Biochemistry, Genetics and Molecular Biology → Structural Biology

Electron and X-Ray Spectroscopy Techniques

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

Removal of silicon-containing contaminants from TEM specimens

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