JOURNAL ARTICLE
Optimization of sensitivity of MEMS micro-pressure sensor
Year: 2022 Journal: Optics and Precision Engineering Vol: 30 (13)Pages: 1582-1590
Abstract
0.
Keywords:
Microelectromechanical systems Sensitivity (control systems) Pressure sensor Materials science Computer science Nanotechnology Electronic engineering Engineering Mechanical engineering
Metrics
2
Cited By
0.22
FWCI (Field Weighted Citation Impact)
0
Refs
0.50
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Is in top 1%
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Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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