JOURNAL ARTICLE

Optimization of sensitivity of MEMS micro-pressure sensor

Shiqiu PENGSaining ZHU

Year: 2022 Journal:   Optics and Precision Engineering Vol: 30 (13)Pages: 1582-1590

Abstract

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Keywords:
Microelectromechanical systems Sensitivity (control systems) Pressure sensor Materials science Computer science Nanotechnology Electronic engineering Engineering Mechanical engineering

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Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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