Sensitivity Optimization of MEMS Based Piezoresistive Pressure Sensor for Harsh Environment

Priyanshu Verma; Deepak Punetha; Saurabh Kumar Pandey

doi:10.1007/s12633-019-00362-8

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JOURNAL ARTICLE

Sensitivity Optimization of MEMS Based Piezoresistive Pressure Sensor for Harsh Environment

Priyanshu Verma Deepak Punetha Saurabh Kumar Pandey

Year: 2020 Journal: Silicon Vol: 12 (11)Pages: 2663-2671 Publisher: Springer Science+Business Media

DOI: 10.1007/s12633-019-00362-8

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Keywords:

Materials science Silicon carbide Piezoresistive effect Microelectromechanical systems Silicon Resistor Diaphragm (acoustics) Silicon bandgap temperature sensor Sensitivity (control systems) Pressure sensor Optoelectronics Composite material Electronic engineering Electrical engineering Mechanical engineering Vibration Acoustics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Sensitivity Optimization of MEMS Based Piezoresistive Pressure Sensor for Harsh Environment

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