JOURNAL ARTICLE

Sensitivity Optimization of MEMS Based Piezoresistive Pressure Sensor for Harsh Environment

Priyanshu VermaDeepak PunethaSaurabh Kumar Pandey

Year: 2020 Journal:   Silicon Vol: 12 (11)Pages: 2663-2671   Publisher: Springer Science+Business Media
Keywords:
Materials science Silicon carbide Piezoresistive effect Microelectromechanical systems Silicon Resistor Diaphragm (acoustics) Silicon bandgap temperature sensor Sensitivity (control systems) Pressure sensor Optoelectronics Composite material Electronic engineering Electrical engineering Mechanical engineering Vibration Acoustics

Metrics

39
Cited By
1.77
FWCI (Field Weighted Citation Impact)
25
Refs
0.85
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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