BOOK-CHAPTER

Design of High Sensitivity SOI Piezoresistive MEMS Pressure Sensor

T. Pravin RajS. B. BurjeR. Joseph Daniel

Year: 2011 Communications in computer and information science Pages: 109-112   Publisher: Springer Science+Business Media
Keywords:
Wheatstone bridge Resistor Piezoresistive effect Microelectromechanical systems Sensitivity (control systems) Materials science Bridge (graph theory) Silicon on insulator Ultimate tensile strength Diaphragm (acoustics) Pressure sensor Optoelectronics Composite material Electrical engineering Engineering Electronic engineering Silicon Mechanical engineering Medicine

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Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Sensor Technology and Measurement Systems
Physical Sciences →  Computer Science →  Computer Networks and Communications

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