Design of High Sensitivity SOI Piezoresistive MEMS Pressure Sensor

T. Pravin Raj; S. B. Burje; R. Joseph Daniel

doi:10.1007/978-3-642-20499-9_18

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Design of High Sensitivity SOI Piezoresistive MEMS Pressure Sensor

T. Pravin Raj S. B. Burje R. Joseph Daniel

Year: 2011 Communications in computer and information science Pages: 109-112 Publisher: Springer Science+Business Media

DOI: 10.1007/978-3-642-20499-9_18

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Keywords:

Wheatstone bridge Resistor Piezoresistive effect Microelectromechanical systems Sensitivity (control systems) Materials science Bridge (graph theory) Silicon on insulator Ultimate tensile strength Diaphragm (acoustics) Pressure sensor Optoelectronics Composite material Electrical engineering Engineering Electronic engineering Silicon Mechanical engineering Medicine

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Design of High Sensitivity SOI Piezoresistive MEMS Pressure Sensor

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