JOURNAL ARTICLE

Two-photon shape-modulated maskless lithography of positive photoresist of S1813

Keywords:
Maskless lithography Photoresist Lithography Materials science Optics Photolithography Optoelectronics Next-generation lithography Multiple patterning Wafer Fabrication Nanotechnology Resist Electron-beam lithography Physics

Metrics

8
Cited By
1.27
FWCI (Field Weighted Citation Impact)
25
Refs
0.70
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Nonlinear Optical Materials Studies
Physical Sciences →  Engineering →  Biomedical Engineering
Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Orbital Angular Momentum in Optics
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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