JOURNAL ARTICLE

Fabrication of Flexible Coil on PDMS for MEMS-based Electromagnetic Membrane Actuator

Chao QiAtsushi NakazatoNaohiro SugitaTadahiko Shinshi

Year: 2022 Journal:   Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022) Pages: 571-572
Keywords:
Microelectromechanical systems Fabrication Actuator Electromagnetic coil Materials science Membrane Optoelectronics Mechanical engineering Electrical engineering Engineering Chemistry

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