Fabrication of Flexible Coil on PDMS for MEMS-based Electromagnetic Membrane Actuator

Chao Qi; Atsushi Nakazato; Naohiro Sugita; Tadahiko Shinshi

doi:10.3850/978-981-18-6021-8_or-12-0113.html

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JOURNAL ARTICLE

Fabrication of Flexible Coil on PDMS for MEMS-based Electromagnetic Membrane Actuator

Chao Qi Atsushi Nakazato Naohiro Sugita Tadahiko Shinshi

Year: 2022 Journal: Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022) Pages: 571-572

DOI: 10.3850/978-981-18-6021-8_or-12-0113.html

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Keywords:

Microelectromechanical systems Fabrication Actuator Electromagnetic coil Materials science Membrane Optoelectronics Mechanical engineering Electrical engineering Engineering Chemistry

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Modular Robots and Swarm Intelligence

Physical Sciences → Engineering → Mechanical Engineering

Plasma Diagnostics and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Fabrication of Flexible Coil on PDMS for MEMS-based Electromagnetic Membrane Actuator

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