An electromagnetic micro-actuator with PDMS-Fe3O4 nanocomposite magnetic membrane

Ali Paknahad; Mohammad Tahmasebipour

doi:10.1016/j.mee.2019.111031

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An electromagnetic micro-actuator with PDMS-Fe3O4 nanocomposite magnetic membrane

Ali Paknahad Mohammad Tahmasebipour

Year: 2019 Journal: Microelectronic Engineering Vol: 216 Pages: 111031-111031 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2019.111031

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Keywords:

Actuator Materials science Polydimethylsiloxane Membrane Nanocomposite Magnetic nanoparticles Deflection (physics) Magnetic field Composite material Optoelectronics Nanotechnology Nanoparticle Electrical engineering Optics Physics Engineering Chemistry

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Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Microfluidic and Capillary Electrophoresis Applications

Physical Sciences → Engineering → Biomedical Engineering

Microfluidic and Bio-sensing Technologies

Physical Sciences → Engineering → Biomedical Engineering

An electromagnetic micro-actuator with PDMS-Fe3O4 nanocomposite magnetic membrane

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