Thin-film temperature sensor made from polymer-derived ceramics based on laser pyrolysis

Zaifu Cui; Xiaojun Chen; Xin Li; Guangzhou Sui

doi:10.1016/j.sna.2022.114144

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Thin-film temperature sensor made from polymer-derived ceramics based on laser pyrolysis

Zaifu Cui Xiaojun Chen Xin Li Guangzhou Sui

Year: 2022 Journal: Sensors and Actuators A Physical Vol: 350 Pages: 114144-114144 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2022.114144

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Keywords:

Materials science Ceramic Thin film Fabrication Composite material Pyrolysis Temperature measurement Layer (electronics) Polymer Laser Optoelectronics Head (geology) Repeatability Nanotechnology Optics Chemical engineering

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Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Electrical and Thermal Properties of Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Thin-film temperature sensor made from polymer-derived ceramics based on laser pyrolysis

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