Thin-film temperature sensor made from particle-filled polymer-derived ceramics pyrolyzed in vacuum

Zaifu Cui; Xin Li; Guochun Chen; Chao Wu; Gonghan He; Zhenyin Hai; Qinnan Chen; Daoheng Sun

doi:10.1016/j.jeurceramsoc.2022.01.035

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Thin-film temperature sensor made from particle-filled polymer-derived ceramics pyrolyzed in vacuum

Zaifu Cui Xin Li Guochun Chen Chao Wu Gonghan He Zhenyin Hai Qinnan Chen Daoheng Sun

Year: 2022 Journal: Journal of the European Ceramic Society Vol: 42 (6)Pages: 2735-2742 Publisher: Elsevier BV

DOI: 10.1016/j.jeurceramsoc.2022.01.035

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Keywords:

Materials science Thin film Ceramic Fabrication Composite material Pyrolysis Temperature measurement Polymer Work (physics) Optoelectronics Nanotechnology Mechanical engineering Chemical engineering

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Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Gas Dynamics and Kinetic Theory

Physical Sciences → Mathematics → Applied Mathematics

Thin-film temperature sensor made from particle-filled polymer-derived ceramics pyrolyzed in vacuum

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