Design and Fabrication of Indium Tin Oxide Based Thin Film Piezoresistive Pressure Sensor

S. Mala; H. K. E. Latha; A. Udayakumar

doi:10.2139/ssrn.4295763

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JOURNAL ARTICLE

Design and Fabrication of Indium Tin Oxide Based Thin Film Piezoresistive Pressure Sensor

S. Mala H. K. E. Latha A. Udayakumar

Year: 2022 Journal: SSRN Electronic Journal Publisher: RELX Group (Netherlands)

DOI: 10.2139/ssrn.4295763

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Keywords:

Fabrication Materials science Indium tin oxide Piezoresistive effect Pressure sensor Optoelectronics Thin film Oxide Indium Thin-film transistor Nanotechnology Composite material Electronic engineering Metallurgy Mechanical engineering Layer (electronics) Engineering

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Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Advanced Sensor and Control Systems

Physical Sciences → Engineering → Control and Systems Engineering

Design and Fabrication of Indium Tin Oxide Based Thin Film Piezoresistive Pressure Sensor

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