Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization

S. Santosh Kumar; B. D. Pant

doi:10.1007/s00542-014-2318-1

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Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization

S. Santosh Kumar B. D. Pant

Year: 2014 Journal: Microsystem Technologies Vol: 21 (9)Pages: 1949-1958 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-014-2318-1

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Keywords:

Materials science Piezoresistive effect Fabrication Silicon on insulator Pressure sensor Finite element method Optoelectronics Silicon Microelectromechanical systems Diaphragm (acoustics) Bulk micromachining Laser Doppler vibrometer Clamping Surface micromachining Electronic engineering Acoustics Vibration Structural engineering Engineering Mechanical engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization

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