JOURNAL ARTICLE

Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization

S. Santosh KumarB. D. Pant

Year: 2014 Journal:   Microsystem Technologies Vol: 21 (9)Pages: 1949-1958   Publisher: Springer Science+Business Media
Keywords:
Materials science Piezoresistive effect Fabrication Silicon on insulator Pressure sensor Finite element method Optoelectronics Silicon Microelectromechanical systems Diaphragm (acoustics) Bulk micromachining Laser Doppler vibrometer Clamping Surface micromachining Electronic engineering Acoustics Vibration Structural engineering Engineering Mechanical engineering

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59
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2.03
FWCI (Field Weighted Citation Impact)
24
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0.90
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Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
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