Plasma-enhanced chemical vapor deposition of TiB2 and TiBN hard coatings using BBr3

JOURNAL ARTICLE

Year: 2022 Journal: Tribology International Vol: 179 Pages: 108137-108137 Publisher: Elsevier BV

DOI: 10.1016/j.triboint.2022.108137

Keywords:

Chemical vapor deposition Materials science Chemical engineering Plasma Deposition (geology) Nanotechnology

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced materials and composites

Physical Sciences → Engineering → Mechanical Engineering