Effect of surface roughness on femtosecond laser ablation of 4H-SiC substrates

Jianqiang Chen; Xiaozhu Xie; Qingfa Peng; Ziyu He; Wei Hu; Qinglei Ren; Jiangyou Long

doi:10.1007/s11771-022-5136-0

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Effect of surface roughness on femtosecond laser ablation of 4H-SiC substrates

Jianqiang Chen Xiaozhu Xie Qingfa Peng Ziyu He Wei Hu Qinglei Ren Jiangyou Long

Year: 2022 Journal: Journal of Central South University Vol: 29 (10)Pages: 3294-3303 Publisher: Springer Nature

DOI: 10.1007/s11771-022-5136-0

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Keywords:

Femtosecond Materials science Ablation Surface roughness Laser Irradiation Surface finish Laser ablation Annealing (glass) Optics Optoelectronics Machining Composite material Metallurgy

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Effect of surface roughness on femtosecond laser ablation of 4H-SiC substrates

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