Femtosecond laser-induced nano structures on 4H-SiC surface
Abstract
Femtosecond lasers can induce Laser-Induced Periodic Surface Structures (LIPSS) on the surfaces of diverse materials. However, the relatively high roughness of these structures is a major challenge. This research, centered on SiC materials and utilizing linear polarization, aimed to address this issue. The study successfully produced uniform structure and minimal roughness by controlling fluence and scanning speed. This structure was characterized by High-Quality Low Spatial Frequency LIPSS (HQ-LSFL).
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