JOURNAL ARTICLE
6105. UV/ozone cleaning of surfaces
Year: 1986 Journal: Vacuum Vol: 36 (10)Pages: 726-726 Publisher: Elsevier BV
Keywords:
Ozone Environmental chemistry Environmental science Chemistry Materials science Organic chemistry
Metrics
9
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.45
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Surface Modification and Superhydrophobicity
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Surface Roughness and Optical Measurements
Physical Sciences → Engineering → Computational Mechanics
Photopolymerization techniques and applications
Physical Sciences → Chemistry → Organic Chemistry
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