High-Performance Flexible Piezoresistive Pressure Sensor Printed with 3D Microstructures

Abstract

Flexible pressure sensors have been widely used in health detection, robot sensing, and shape recognition. The micro-engineered design of the intermediate dielectric layer (IDL) has proven to be an effective way to optimize the performance of flexible pressure sensors. Nevertheless, the performance development of flexible pressure sensors is limited due to cost and process difficulty, prepared by inverted mold lithography. In this work, microstructured arrays printed by aerosol printing act as the IDL of the sensor. It is a facile way to prepare flexible pressure sensors with high performance, simplified processes, and reduced cost. Simultaneously, the effects of microstructure size, PDMS/MWCNTs film, microstructure height, and distance between the microstructures on the sensitivity and response time of the sensor are studied. When the microstructure size, height, and distance are 250 µm, 50 µm, and 400 µm, respectively, the sensor shows a sensitivity of 0.172 kPa−1 with a response time of 98.2 ms and a relaxation time of 111.4 ms. Studies have proven that the microstructured dielectric layer printed by aerosol printing could replace the inverted mold technology. Additionally, applications of the designed sensor are tested, such as the finger pressing test, elbow bending test, and human squatting test, which show good performance.