JOURNAL ARTICLE

High Aspect Ratio Arrays of Si Nano-Pillars Using Displacement Talbot Lithography and Gas-Macetch

Keywords:
Lithography Materials science Aspect ratio (aeronautics) Talbot effect Nano- Displacement (psychology) Nanotechnology Optoelectronics Composite material

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Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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