JOURNAL ARTICLE

Fabrication of high aspect ratio nano gratings using SR lithography

Fumiki KatoShinya FujinawaYigui LiSusumu Sugiyama

Year: 2006 Journal:   Microsystem Technologies Vol: 13 (3-4)Pages: 221-225   Publisher: Springer Science+Business Media
Keywords:
Fabrication Materials science Lithography Grating Aspect ratio (aeronautics) Resist Optics Nanolithography Nano- Next-generation lithography Nanoimprint lithography Photolithography Diffraction grating Nanoscopic scale Optoelectronics X-ray lithography Interference lithography Synchrotron radiation Nanotechnology Electron-beam lithography Composite material Physics

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Citation History

Topics

Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Photonic Crystals and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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