JOURNAL ARTICLE

Fabrication of high aspect ratio subwavelength gratings based on X-ray lithography and electron beam lithography

Chenchen LuoYigui LiSusumu Sugiyama

Year: 2012 Journal:   Optics & Laser Technology Vol: 44 (6)Pages: 1649-1653   Publisher: Elsevier BV
Keywords:
X-ray lithography Electron-beam lithography Lithography Materials science Fabrication Next-generation lithography Optics Stencil lithography Maskless lithography Optoelectronics Extreme ultraviolet lithography Cathode ray Beam (structure) Resist Electron Nanotechnology Physics

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0.81
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Citation History

Topics

Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Plasmonic and Surface Plasmon Research
Physical Sciences →  Engineering →  Biomedical Engineering
Orbital Angular Momentum in Optics
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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