JOURNAL ARTICLE
Controlled anisotropic etching of polysilicon
Year: 1985 Journal: Microelectronics Journal Vol: 16 (4)Pages: 43-43 Publisher: Elsevier BV
Keywords:
Materials science Etching (microfabrication) Anisotropy Polysilicon depletion effect Optoelectronics Engineering physics Composite material Electrical engineering Engineering Optics Physics Voltage Transistor
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Topics
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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