JOURNAL ARTICLE
Controlled anisotropic etching of polysilicon
Year: 1983 Journal: Microelectronics Reliability Vol: 23 (3)Pages: 601-601 Publisher: Elsevier BV
Keywords:
Thermionic emission Quantum tunnelling Condensed matter physics Saturation current Doping Transmission coefficient Atmospheric temperature range Rectangular potential barrier Current density Materials science Fermi level Chemistry Physics Electron Electrical engineering Transmission (telecommunications) Voltage Thermodynamics
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1
Cited By
0.23
FWCI (Field Weighted Citation Impact)
0
Refs
0.54
Citation Normalized Percentile
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Topics
Semiconductor materials and interfaces
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
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