JOURNAL ARTICLE
Capacitors with thin oxide film dielectrics
Year: 1965 Journal: Microelectronics Reliability Vol: 4 (4)Pages: 384-385 Publisher: Elsevier BV
Keywords:
Capacitor Materials science Dielectric Film capacitor Oxide Optoelectronics Thin film Composite material Engineering physics Electrical engineering Nanotechnology Engineering Metallurgy Voltage
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Topics
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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