JOURNAL ARTICLE
Capacitors with thin oxide film dielectrics
Year: 1965 Journal: Vacuum Vol: 15 (10)Pages: 526-526 Publisher: Elsevier BV
Keywords:
Capacitor Dielectric Materials science Oxide Thin film Film capacitor Optoelectronics Nanotechnology Electrical engineering Metallurgy Engineering Voltage
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Topics
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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