JOURNAL ARTICLE

Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films

Abstract

Abstract not Available.

Keywords:
Atomic layer deposition Plasma Materials science Layer (electronics) Oxide Thin film Metal Deposition (geology) Chemical engineering Nanotechnology Metallurgy Physics Geology Engineering

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Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Catalytic Processes in Materials Science
Physical Sciences →  Materials Science →  Materials Chemistry
Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
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