JOURNAL ARTICLE

Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition

Keywords:
Beryllium oxide Atomic layer deposition Materials science Thin film Dielectric Band gap Wurtzite crystal structure Substrate (aquarium) Optoelectronics Physical vapor deposition Analytical Chemistry (journal) Nanotechnology Beryllium Metallurgy Chemistry Zinc

Metrics

17
Cited By
0.73
FWCI (Field Weighted Citation Impact)
40
Refs
0.72
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Ferroelectric and Negative Capacitance Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
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