JOURNAL ARTICLE
Ion-excited Auger electron emission from silicon
Year: 1980 Journal: Vacuum Vol: 30 (4-5)Pages: 203-203 Publisher: Elsevier BV
Keywords:
Ion Excited state Atomic physics Auger Silicon Electron Auger electron spectroscopy Materials science Auger effect Physics Optoelectronics Nuclear physics
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Topics
Electron and X-Ray Spectroscopy Techniques
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences → Engineering → Electrical and Electronic Engineering
Ion-surface interactions and analysis
Physical Sciences → Engineering → Computational Mechanics
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