JOURNAL ARTICLE
"Reliability of Electrostatically Actuated RF MEMS Switches"
Keywords:
Microelectromechanical systems Reliability (semiconductor) Radio frequency Computer science Electrical engineering Electronic engineering Reliability engineering Materials science Engineering Optoelectronics Physics
Metrics
2
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.46
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Manufacturing Process and Optimization
Physical Sciences → Engineering → Industrial and Manufacturing Engineering
Related Documents
JOURNAL ARTICLE
Reliability of Electrostatically Actuated RF MEMS Switches
Year: 2007 Vol: 6463 Pages: 168-171
JOURNAL ARTICLE
Design of electrostatically actuated MEMS switches
Journal: Colloids and Surfaces A Physicochemical and Engineering Aspects Year: 2007 Vol: 313-314 Pages: 469-473
JOURNAL ARTICLE
Dielectric Charging in Electrostatically Actuated MEMS Ohmic Switches
Zhen PengCristiano PalegoSubrata HalderJames C. M. HwangC. JahnesKonstantin EtzoldJ. CotteJ. H. Magerlein
Journal: IEEE Transactions on Device and Materials Reliability Year: 2008 Vol: 8 (4)Pages: 642-646
JOURNAL ARTICLE
Reliability issues for electrostatically actuated MEMS switch
Year: 2022 Vol: 1695 Pages: 23-23
JOURNAL ARTICLE
Electrostatically actuated micromechanical switches
S. B. MajumderN.E. McGruerP.M. Zavracky
Journal: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Year: 1997 Vol: 15 (3)Pages: 1246-1249