JOURNAL ARTICLE

"Reliability of Electrostatically Actuated RF MEMS Switches"

Keywords:
Microelectromechanical systems Reliability (semiconductor) Radio frequency Computer science Electrical engineering Electronic engineering Reliability engineering Materials science Engineering Optoelectronics Physics

Metrics

2
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.46
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Manufacturing Process and Optimization
Physical Sciences →  Engineering →  Industrial and Manufacturing Engineering

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