Electrostatically actuated micromechanical switches

S. B. Majumder; N.E. McGruer; P.M. Zavracky

doi:10.1116/1.580602

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Electrostatically actuated micromechanical switches

S. B. Majumder N.E. McGruer P.M. Zavracky

Year: 1997 Journal: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Vol: 15 (3)Pages: 1246-1249 Publisher: American Institute of Physics

DOI: 10.1116/1.580602

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Abstract

Micromechanical switches and relays realized by a simple surface micromachining process are presented. The devices use a nickel cantilever beam and gold-to-gold electrical contact, and are electrostatically actuated. They have lifetimes exceeding 109 cycles, and a current handling capability of 150 mA.

Keywords:

Cantilever Surface micromachining Materials science Electrical contacts Bulk micromachining Optoelectronics Microelectromechanical systems Nanotechnology Process (computing) Electrical engineering Fabrication Composite material Engineering Computer science

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Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Nanotechnology research and applications

Physical Sciences → Engineering → Biomedical Engineering

Electrostatically actuated micromechanical switches

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